The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
TY - UNPB AU - Kato, R. AU - Honda, Y. AU - Kawata, H. AU - Miyajima, T. AU - Nakamura, N. AU - Sakai, H. AU - Shimada, M. AU - Tanimoto, Y. AU - Tsuchiya, K. ED - Schaa, Volker R.W. ED - Decking, Winfried ED - Sinn, Harald ED - Geloni, Gianluca ED - Schreiber, Siegfried ED - Marx, Michaela TI - IR-FEL Project at the cERL and Future EUV-FEL Lithography J2 - Proc. of FEL2019, Hamburg, Germany, 26-30 August 2019 CY - Hamburg, Germany T2 - Free Electron Laser Conference T3 - 39 LA - english AB - Recently KEK has launched an infrared FEL project with a competitive funding from NEDO (New Energy and Industrial Technology Development Organization). The purpose of this project is to build a mid-infrared FEL at the compact Energy Recovery Linac (cERL), and to use that FEL as a light source for construction of the processing database required for industrial lasers. The FEL system is composed of two 3 m undulators and a matching section between them, and generates light with a maximum pulse energy of 1 µJ at the wavelength of 20 µm with an 81.25 MHz repetition rate. The FEL is also expected to become a proof-of-concept machine for ERL base FELs for future EUV lithography. The detail of the project will be presented, and the relationship of the technical development between the mid-infrared FEL and the future EUV-FEL will be discussed. PB - JACoW Publishing CP - Geneva, Switzerland ER -