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RIS citation export for THA03: IR-FEL Project at the cERL and Future EUV-FEL Lithography

AU  - Kato, R.
AU  - Honda, Y.
AU  - Kawata, H.
AU  - Miyajima, T.
AU  - Nakamura, N.
AU  - Sakai, H.
AU  - Shimada, M.
AU  - Tanimoto, Y.
AU  - Tsuchiya, K.
ED  - Schaa, Volker R.W.
ED  - Decking, Winfried
ED  - Sinn, Harald
ED  - Geloni, Gianluca
ED  - Schreiber, Siegfried
ED  - Marx, Michaela
TI  - IR-FEL Project at the cERL and Future EUV-FEL Lithography
J2  - Proc. of FEL2019, Hamburg, Germany, 26-30 August 2019
CY  - Hamburg, Germany
T2  - Free Electron Laser Conference
T3  - 39
LA  - english
AB  - Recently KEK has launched an infrared FEL project with a competitive funding from NEDO (New Energy and Industrial Technology Development Organization). The purpose of this project is to build a mid-infrared FEL at the compact Energy Recovery Linac (cERL), and to use that FEL as a light source for construction of the processing database required for industrial lasers. The FEL system is composed of two 3 m undulators and a matching section between them, and generates light with a maximum pulse energy of 1 µJ at the wavelength of 20 µm with an 81.25 MHz repetition rate. The FEL is also expected to become a proof-of-concept machine for ERL base FELs for future EUV lithography. The detail of the project will be presented, and the relationship of the technical development between the mid-infrared FEL and the future EUV-FEL will be discussed.
PB  - JACoW Publishing
CP  - Geneva, Switzerland
ER  -